Silica-based optical waveguide on terraced silicon substrate as hybrid integration platform

4 March 1993

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 29 (5) , 444-446
https://doi.org/10.1049/el:19930297

Abstract

A silica-based optical waveguide on a silicon substrate with terrace regions is proposed. Because the substrate is equipped with a low-loss waveguide and an optical bench at the same time, it is applicable to a hybrid integration platform.

Keywords

HYBRID INTEGRATION PLATFORM
SEM
OPTICAL BENCH
OPTICAL HYBRID INTEGRATION
SIO2-SI
PROPAGATION LOSS
TERRACED SI SUBSTRATE
LOW-LOSS WAVEGUIDE
OPTICAL WAVEGUIDE