Growth mechanism of microcrystalline silicon at high pressure conditions
- 1 June 2004
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 338-340, 56-60
- https://doi.org/10.1016/j.jnoncrysol.2004.02.021
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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- A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experimentsJournal of Applied Physics, 1997