Arc-Discharge Produced Amorphous-Silicon Solar-cells
- 1 January 1982
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 21 (S2)
- https://doi.org/10.7567/jjaps.21s2.225
Abstract
Quality and uniformity of the arc-discharge produced amorphoussilicon (a-Si) films have been investigated by using pin type solar cells. Six substrates, each of which being 5 cm×30 cm, were inserted into a reaction tube of 7.5 cm in diameter and a-Si films were deposited simultaneously on every substrate. A film thickness of 1 µm±0.2 µm and solar Cell efficiency of 1.24%±0.5% were obtained in more than a half of the substrate area. The cell fabricated in a smaller reaction tube showed an efficiency of 5.3%. These results indicate that the arc-discharge decomposition method is applicable for depositing a-Si films of high quality and large area.Keywords
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