Promise and challenge of thin-film silicon approaches to active matrices

1 May 1983

journal article
Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices

Vol. 30 (5) , 525-532
https://doi.org/10.1109/t-ed.1983.21161

Abstract

This paper reviews the state of the art of laser-annealed crystalline, amorphous, and small-grained polycrystalline Si thin-film transistor arrays built for the addressing of liquid-crystal displays. The fabrication and performance of these arrays are compared with each other and with the more traditional CdSe-type device arrays.

Keywords

CAPACITANCE
FABRICATION
SWITCHES
THIN FILM
VARISTORS
LIQUID CRYSTAL DISPLAYS
THIN FILM TRANSISTORS
SILICON