Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen-containing atmosphere
- 1 February 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (3) , 1687-1696
- https://doi.org/10.1063/1.347213
Abstract
Experimental results are reported concerning the synthesis of pure, hard, and adherent titanium nitride layers by multipulse excimer (λ=308 nm) laser irradiation in a nitrogen or ammonia atmosphere. It is shown that the process is more efficient when the irradiation is performed in a nitrogen atmosphere. The general characteristics of synthesized surface compound layers are compatible with the requirements of utilization in microelectronics.This publication has 24 references indexed in Scilit:
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