Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
- 22 January 1996
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 68 (4) , 467-468
- https://doi.org/10.1063/1.116415
Abstract
An atomic force microscope cantilever with PZT thin film with pyramidal stylus was used for actuation of feedback motion. The maximum stroke of the cantilever was more than 1 μm within a frequency range from direct current up to natural resonant frequency, e.g., 28.48 kHz. An image of a pit of a compact disk with a depth of 100 nm was successfully obtained using only cantilever actuation in a vertical direction.Keywords
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