Superconductivity of Niobium Thin Films Deposited by dc Diode Sputtering
- 1 October 1967
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 38 (11) , 4390-4392
- https://doi.org/10.1063/1.1709136
Abstract
Niobium films with superconducting transition temperatures between 8.2° and 9.1°K have been deposited by dc diode sputtering. The results are shown to be due to the reduction of the film impurity content by extensive presputtering and high substrate temperatures.This publication has 10 references indexed in Scilit:
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