Determination of the crystallographic orientation of cubic media to high resolution using optical harmonic generation
- 15 November 1993
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 74 (10) , 6072-6078
- https://doi.org/10.1063/1.355223
Abstract
Using the tensorial characteristic of optical harmonic generation it is shown that the crystallographic orientation of centrosymmetric and noncentrosymmetric cubic media can be determined to within ±0.1°. As an illustration of the technique the orientation of vicinal GaAs(001) and Si(111) single-crystal wafers is obtained using second- and third-harmonic generation, respectively, with a continuously mode-locked Ti:sapphire laser operating at 775 nm. Intensity measurements were taken as a function of the wafer azimuthal angle and are fit to a truncated Fourier series derived from a phenomenological theory.This publication has 10 references indexed in Scilit:
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