Fabrication of grooved glass substrates by phase mask lithography

• 1 November 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 9  (6) , 3155-3161
• https://doi.org/10.1116/1.585308

Abstract

Keywords

• PHASE SHIFT MASK
• OPTICAL STORAGE
• PHASE SHIFT