Densite des metastables d'argon dans une decharge de pulverisation
- 26 November 1979
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 74 (5) , 313-315
- https://doi.org/10.1016/0375-9601(79)90805-3
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Plasma Diagnostics and Energy Transport of a dc Discharge Used for SputteringJournal of Applied Physics, 1972