Etch Pit Study of GaAs{001} LPE Layer by Molten KOH

• 1 February 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (2) , 447-448
• https://doi.org/10.1143/jjap.17.447

Abstract

Keywords

• GAAS
• ETCH PIT
• PIT STUDY
• MOLTEN KOH
• LPE LAYER