Surface Analysis by Laser Ionization
- 1 December 1993
- journal article
- research article
- Published by Wiley in Berichte der Bunsengesellschaft für physikalische Chemie
- Vol. 97 (12) , 1688-1691
- https://doi.org/10.1002/bbpc.19930971228
Abstract
A new reflecting time of flight mass spectrometer is described which allows to display absolute saturation of laser ionization. For each specific chargeq/mthe new TOF instrument creates two ion bunches containing the ions originating respectively inside and outside a sharply‐limited acceptance volume of the spectrometer. Thus quantification of laser ionization is possible. This method has been applied to non‐resonant KrF excimer laser post‐ionization of sputtered metal atoms. It may be developed into a very sensitive tool for quantitative surface analysis.Keywords
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