tert-Butoxycarbonylated novolacs as chemically amplified dual-tone resists

• 1 January 1992
• journal article
• Published by Elsevier in Polymer
• Vol. 33  (21) , 4653-4655
• https://doi.org/10.1016/0032-3861(92)90430-5

Abstract

Keywords

• TERT-BUTOXYCARBONYLATED NOVOLAC
• CHEMICAL AMPLIFICATION
• DEEP-U.V. AND ELECTRON-BEAM RESIST