A method of rapidly obtaining concentration-depth profiles from x-ray diffraction

Abstract
The construction of composition profiles from x-ray diffraction peaks is an important and reliable technique, but it has not been widely adopted because it required hours of computer time and/or complicated optimization routines. The method proposed here utilizes an easily evaluated analysis of the diffraction peak. It is applicable to thin films and thick specimens for which the variation with composition of lattice parameters, linear absorption coefficient, and reflectivity are known. A deconvolution scheme is outlined that includes corrections for the instrumental broadening and singlet or doublet radiation.

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