Chemistry and kinetics of chemical vapor deposition of pyrocarbon—II pyrocarbon deposition from ethylene, acetylene and 1,3-butadiene in the low temperature regime
- 31 December 1998
- Vol. 36 (3) , 177-199
- https://doi.org/10.1016/s0008-6223(97)00175-9
Abstract
No abstract availableKeywords
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