Microfabricated hinges
- 1 June 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (3) , 249-256
- https://doi.org/10.1016/0924-4247(92)80172-y
Abstract
No abstract availableKeywords
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- Micro-structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Laser-chemical three-dimensonal writing of multimaterial structures for microelectromechanicsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A monolithic gas flow sensor with polyimide as thermal insulatorIEEE Transactions on Electron Devices, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982