Quantitative Analysis of Na in Si with SIMS

• 1 September 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (9) , 1697-1698
• https://doi.org/10.1143/jjap.17.1697

Abstract

Keywords

• NA IN SI
• SI WITH SIMS
• QUANTITATIVE ANALYSIS OF NA