Recombination dynamics of traps in SiO 2 layer on Si by scanning capacitance microscopy

• 1 March 1998
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 66  (7) , S415-S419
• https://doi.org/10.1007/s003390051174

Abstract

Keywords

• PACS: 72.20.JV; 72.80.EY; 85.30.DE