The location, evolution, and role of fluorine in glow discharge a-Si:F

• 1 December 1983
• journal article
• Published by Elsevier in Journal of Non-Crystalline Solids
• Vol. 59-60, 743-746
• https://doi.org/10.1016/0022-3093(83)90278-8

Abstract

Keywords

• EVOLUTION
• GLOW DISCHARGE
• LOCATION
• ROLE OF FLUORINE
• FLUORINE IN GLOW