Application of LFB acoustic microscope to film thickness measurements

4 June 1987

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 23 (12) , 652-654
https://doi.org/10.1049/el:19870467

Abstract

The line-focus-beam (LFB) acoustic microscope is applied to measure the precise thickness of thin films using the velocity dispersion of leaky waves in layered samples. The measurement principle and accuracy are investigated theoretically and experimentally, taking a configuration of Au-film on fused quartz. It is demonstrated at 225 MHz that the thickness resolution better than 2 Å is achieved for a 3000 Å sample using leaky pseudosurface acoustic waves.

Keywords

LAYERED SAMPLES
THICKNESS RESOLUTION
LEAKY PSEUDOSURFACE ACOUSTIC WAVES
LINE FOCUS BEAM ACOUSTIC MICROSCOPE
225 MHZ
VELOCITY DISPERSION OF LEAKY WAVES
FILM THICKNESS MEASUREMENTS
3000 A
THIN FILMS
AU-SIO2
ACCURACY
AU-FILM ON FUSED QUARTZ
OPERATION
LFB ACOUSTIC MICROSCOPE

This publication has 1 reference indexed in Scilit:

Determination and Some Uses of Isotropic Elastic Constants of Polycrystalline Aggregates Using Single-Crystal Data
Published by Elsevier ,1965