An Electrostatfcally Actuated Micro-relay
- 24 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 380-383
- https://doi.org/10.1109/sensor.1995.721826
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Electromagnetic microrelays: Concepts and fundamental characteristicsSensors and Actuators A: Physical, 1994
- Sputtered Ruthenium as a Contact Material for Sealed ReedsIEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1978