Resolution enhancement of film thickness estimators by means of dispersion compensation
- 1 May 1991
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 20 (5) , 379-382
- https://doi.org/10.1007/bf02670887
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A new algorithm for layer thickness and index step estimation in multi-layer hetero-epitaxial structuresJournal of Electronic Materials, 1990
- Thickness estimation of silicon-on-lnsulator by means of the fourier transform of bilinearly transformed infrared reflectance dataJournal of Electronic Materials, 1990
- Interference Method for Measuring the Thickness of Epitaxially Grown FilmsJournal of Applied Physics, 1961