Negativ-Photoresist für den nahen UV-Bereich
- 1 December 1986
- journal article
- other
- Published by Wiley in Zeitschrift für Chemie
- Vol. 26 (12) , 441-442
- https://doi.org/10.1002/zfch.19860261212
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- A Series Of Azide-Phenolic Resin Resists For The Range Of Deep UV To Visible LightPublished by SPIE-Intl Soc Optical Eng ,1985