Liquid metal alloy ion sources for B, Sb, and Si

• 1 November 1981
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 19  (4) , 1182-1185
• https://doi.org/10.1116/1.571239

Abstract

Keywords

• CURRENT DENSITY
• MASS SPECTRA
• LIQUID METAL
• ARSENIC
• QUANTUM MECHANICS
• CHARGED PARTICLES
• ELECTRIC CONDUCTIVITY
• ION BEAM