Real-time assessment of overlayer removal on GaN, AlN, and AlGaN surfaces using spectroscopic ellipsometry

30 September 1996

journal article
Published by AIP Publishing in Applied Physics Letters

Vol. 69 (14) , 2065-2067
https://doi.org/10.1063/1.116881

Abstract

Spectroscopic ellipsometry was used to assess the preparation of smooth and abrupt GaN, AlN, and AlGaN surfaces by wet chemical treatments in real time. About 20–50 Å of overlayer typically can be removed from air-exposed samples.

Keywords

GALLIUM NITRIDES
ALUMINIUM NITRIDES
SURFACE CLEANING
ELLIPSOMETRY
OVERLAYERS
VPE

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