Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy
- 24 March 1982
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 0316, 103-106
- https://doi.org/10.1117/12.933141
Abstract
Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.Keywords
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