Abstract
The entrapment of gas atoms at damage sites created during their injection as energetic ions into a solid, is treated theoretically. A general treatment is indicated and a special theory, based on the assumption that the spatial distribution of traps is uniform, is developed. The special theory leads to analytical solutions, which are dependent on the initial spatial distribution of free thermal gas, (i.e. the ‘range profile’). Three cases are considered (plane, xex and ex distributions). It is shown that the assumed model provides that the amount of gas trapped in the solid is initially proportional to the ⅜-power of the ion fluence.