Argon and oxygen sputter etching of polystyrene, polypropylene, and poly(ethylene terephthalate) thin films
- 1 July 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (4) , 2213-2220
- https://doi.org/10.1116/1.575013
Abstract
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