Analysis of lateral force effects on the topography in scanning force microscopy

• 1 May 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (3) , 1559-1564
• https://doi.org/10.1116/1.587286

Abstract

Keywords

• TOPOGRAPHY
• MICROSCOPY
• LATERAL FORCE
• FORCE EFFECTS
• SCANNING FORCE
• ANALYSIS OF LATERAL