Surface Band Structure of Electron Inversion Layers on Vicinal Planes of Si(100)

We have found new minigaps in inversion layers on Si surfaces tilted at $\theta$ from (100) at $k_{\mathrm{F}}=0.85\left(\frac{2\pi }{a}\right)sin\theta , \left(\frac{2\pi }{a}\right)sin\theta , \mathrm{and} 1.15\left(\frac{2\pi }{a}\right)sin\theta$. Our results confirm the surface band-structure model of Sham et al., demonstrate that both intervalley and intravalley minigaps exist, and show that the minibands, expected for two-dimensional electron gas with a one-dimensional superlattice, have been realized in inversion layers with $\theta \lesssim 3°$.