Analytical and numerical modeling of columnar evolution in thin films

• 1 July 1988
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 6  (4) , 2371-2380
• https://doi.org/10.1116/1.575558

Abstract

Keywords

• THIN FILMS
• NUMERICAL MODELING
• COLUMNAR EVOLUTION
• ANALYTICAL AND NUMERICAL