Design and fabrication of silica-based integrated-optic 1×128 power splitter

7 November 1991

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 27 (23) , 2131-2133
https://doi.org/10.1049/el:19911320

Abstract

A 1×128 optical power splitter is fabricated by integrating 127 Y-branch waveguide elements on a 3 inch silicon wafer using silica waveguide technology. The average measured excess loss of this splitter is 3.2 dB including fibre-waveguide coupling loss.

Keywords

SIO2-GEO2
1×128 CONFIGURATION
SI WAFER
FABRICATION
GE DOPED SILICA
SILICA WAVEGUIDE TECHNOLOGY
3.2 DB
OPTICAL POWER SPLITTER
FIBRE-WAVEGUIDE COUPLING LOSS
INTEGRATED-OPTIC
Y-BRANCH WAVEGUIDE ELEMENTS
EXCESS LOSS

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