A high-performance microflowmeter with built-in self test
- 1 March 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 36 (1) , 47-56
- https://doi.org/10.1016/0924-4247(93)80140-c
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Internal stress compensation and scaling in ultrasensitive silicon pressure sensorsIEEE Transactions on Electron Devices, 1992
- An ultrasensitive silicon pressure-based microflow sensorIEEE Transactions on Electron Devices, 1992
- Secondary sensitivities and stability of ultrasensitive silicon pressure sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Analysis, Design, and Performance of a Capacitive Pressure Sensor ICIEEE Transactions on Biomedical Engineering, 1986
- A High-Resolution Capacitance-to-Frequency ConverterIEEE Journal of Solid-State Circuits, 1985
- New clock feedthrough cancellation technique for analogue MOS switched-capacitor circuitsElectronics Letters, 1982
- A monolithic capacitive pressure sensor with pulse-period outputIEEE Transactions on Electron Devices, 1980
- Vibration of Rectangular Plates by the Ritz MethodJournal of Applied Mechanics, 1950