Local bonding configuration of phosphorus in doped and compensated amorphous hydrogenated silicon
- 15 April 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 27 (8) , 4895-4901
- https://doi.org/10.1103/physrevb.27.4895
Abstract
From an analysis of nuclear-magnetic-resonance spectra, the chemical nature and local bonding of phosphorus in samples of amorphous hydrogenated silicon () have been determined. Overlapping spectra of threefold- and fourfold-coordinated phosphorus may be separated on the basis of dipolar couplings and identified on the basis of chemical shifts. At low concentrations of phosphorus, the ratio of threefold- to fourfold-coordinated phosphorus is approximately 4 to 1. The magnitudes of the - and - dipolar couplings indicate that fourfold-coordinated phosphorus is located at internal hydrogenated surfaces. Finally, the increase of fourfold-coordinated sites in compensated suggests the formation of boron-phosphorus complexes.
Keywords
This publication has 21 references indexed in Scilit:
- Observation of a Reversible Field-Induced Doping Effect in Hydrogenated Amorphous SiliconPhysical Review Letters, 1982
- Proton-magnetic-resonance studies of microstructure in plasma-deposited amorphous-silicon—hydrogen filmsPhysical Review B, 1981
- Interaction between arsenic, hydrogen, and silicon matrix in doping of sputtered amorphous hydrogenated siliconApplied Physics Letters, 1981
- A doping-precipitated morphology in plasma-deposited a-Si:HApplied Physics Letters, 1981
- Direct Measurement of the Bulk Density of Gap States in-Type Hydrogenated Amorphous SiliconPhysical Review Letters, 1980
- Coordination of Arsenic Impurities in Amorphous Silicon-Hydrogen AlloysPhysical Review Letters, 1977
- Substitutional doping in amorphous semiconductors the As-Si systemPhilosophical Magazine, 1976
- Electronic properties of substitutionally doped amorphous Si and GePhilosophical Magazine, 1976
- Substitutional doping of amorphous siliconSolid State Communications, 1975
- The Preparation and Properties of Amorphous SiliconJournal of the Electrochemical Society, 1969