Determination of pore-size distribution in low-dielectric thin films
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- 6 March 2000
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 76 (10) , 1282-1284
- https://doi.org/10.1063/1.126009
Abstract
Positronium annihilation lifetime spectroscopy is used to determine the pore-size distribution in low-dielectric thin films of mesoporous methylsilsesquioxane. A physical model of positronium trapping and annihilating in isolated pores is presented. The systematic dependence of the deduced pore-size distribution on pore shape/dimensionality and sample temperature is predicted using a simple quantum mechanical calculation of positronium annihilation in a rectangular pore. A comparison with an electron microscope image is presented. © 2000 American Institute of PhysicsKeywords
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