50‐nm‐Thick Silicon‐on‐Insulator Fabrication by Advanced Epitaxial Lateral Overgrowth: Tunnel Epitaxy
- 1 April 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (4) , 1125-1130
- https://doi.org/10.1149/1.2056210