Using Simultaneous Deposition and Rapid Growth to Produce Nanostructured Composite Films of AIN/TiN by Chemical Vapor Deposition
- 1 May 1996
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 79 (5) , 1335-1342
- https://doi.org/10.1111/j.1151-2916.1996.tb08594.x
Abstract
No abstract availableKeywords
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