Quantitative ion implantation: Theoretical aspects
- 1 June 1979
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Physics
- Vol. 30 (2) , 97-112
- https://doi.org/10.1016/0020-7381(79)80088-1
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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