Self-adjusting microstructures (SAMS)

This publication has 9 references indexed in Scilit:

• Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
• Thermal assembly of polysilicon microstructures
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Microdyanmics
  Sensors and Actuators A: Physical, 1990
• Investigation of Texture and Stress in Undoped Polysilicon Films
  MRS Proceedings, 1990
• Integrated fabrication of polysilicon mechanisms
  IEEE Transactions on Electron Devices, 1988
• As-deposited low-strain LPCVD polysilicon
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,1988
• Applications of Polysilicon Films in Microsensors and Microactuators
  MRS Proceedings, 1987
• Design and characteristics of the lightly doped drain-source (LDD) insulated gate field-effect transistor
  IEEE Transactions on Electron Devices, 1980
• Analysis of Bi-Metal Thermostats
  Journal of the Optical Society of America, 1925