Scanning Force Microscope Using a Common-path Optical Heterodyne Interferometer.

• 1 January 1993
• journal article
• Published by Japan Society for Precision Engineering in Journal of the Japan Society for Precision Engineering
• Vol. 59  (11) , 1853-1858
• https://doi.org/10.2493/jjspe.59.1853

Abstract

Keywords

• PATH OPTICAL
• SCANNING FORCE
• OPTICAL HETERODYNE
• HETERODYNE INTERFEROMETER
• COMMON PATH
• FORCE MICROSCOPE