Fully integrated optical system for lab-on-a-chip applications
- 2 August 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
We present a lab-on-a-chip device featuring a microfluidic dye laser, wave-guides, microfluidic components and photo-detectors integrated on the chip. The microsystem is designed for wavelength selective absorption measurements in the visible range on a fluidic sample, which can be prepared/mixed on-chip. The laser structures, wave-guides and micro-fluidic handling system are defined in a single UV-lithography step on a 10 /spl mu/m thick SU-8 layer on top of the substrate. The SU-8 structures are sealed by a Borofloat glass lid, using polymethylmethacrylate (PMMA) adhesive bonding.Keywords
This publication has 7 references indexed in Scilit:
- PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated opticsJournal of Micromechanics and Microengineering, 2004
- Integration of polymer waveguides for optical detection in microfabricated chemical analysis systemsApplied Optics, 2003
- Microfluidics meets MEMSProceedings of the IEEE, 2003
- A micro-cavity fluidic dye laserJournal of Micromechanics and Microengineering, 2003
- Surface recombination velocity of phosphorus-diffused silicon solar cell emitters passivated with plasma enhanced chemical vapor deposited silicon nitride and thermal silicon oxideJournal of Applied Physics, 2001
- Biochemical microsystems with integrated photodiode arrays of improved sensitivity and functionalityPublished by SPIE-Intl Soc Optical Eng ,1999
- Photosensor and optical waveguide coupling in silicon technologySensors and Actuators A: Physical, 1997