Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles

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Abstract
We report the novel synthesis method of iron nanoparticles that can easily control both position and diameter significantly smaller than the lithography limit, and also demonstrate diameter- and position-controlled carbon nanotube (CNT) growth from the nanoparticles. We patterned iron particles having a 1.7 ±0.6 nm diameter distribution within a positioning accuracy of ±5 nm by means of the "lithographically-anchored nanoparticle synthesis (LANS)" method. CNTs were grown by chemical vapor deposition using ethanol. A catalyst activity of ~10% and a CNT diameter distribution of 1.3 ±0.4 nm were obtained. Raman spectroscopy revealed the presence of single-walled CNTs.

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