Formation of structure in polysilicon films
- 1 March 1976
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 32 (2) , 241-245
- https://doi.org/10.1016/0040-6090(76)90303-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Nucleation of epitaxial films at chemical growthThin Solid Films, 1969
- A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniquesPhilosophical Magazine, 1969