Soft-magnetic properties of compositionally modulated Fe/Al films

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Abstract
Soft‐magnetic properties of Fe/Al compositionally modulated multilayer films prepared in the low argon pressure of 2 mTorr with double target dc magnetron sputtering have been studied. Characteristic x‐ray diffraction peaks corresponding to artificial structure on [Fe(4–50 Å)/Al(8 Å)]150 multilayer films were observed. Maintaining a constant Al layer thickness of 8 Å, the coercivity in the hard axis rapidly decreases from 50 Oe to Fe/δAl < 3.0, the Ms per Fe unit volume decreases with decreasing δFe/δAl. The higher resistivity was obtained in the films of δFe/δAl < 3.0, and resistivity decreases as δFe/δAl increases. The internal film stress also decreases as δFe/δAl increases. The [Fe(20 Å)/Al(8 Å)]150 multilayer film exhibited a low coercivity 0.5 Oe, a high saturation magnetization 1210 emu/cm3, and a high resistivity 119 μΩ cm.

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