Theory of sputtering and comparison to experimental data
- 15 March 1982
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 194 (1-3) , 515-522
- https://doi.org/10.1016/0029-554x(82)90575-4
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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