Transmission electron microscopy studies of brown and golden titanium nitride thin films as diffusion barriers in very large scale integrated circuits
- 1 May 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (3) , 1602-1608
- https://doi.org/10.1116/1.575335
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: