Thermal stability of Mo–Al Schottky metallizations on n-GaAs

• 1 May 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (3) , 756-762
• https://doi.org/10.1116/1.586783

Abstract

Keywords

• SCHOTTKY DIODE
• MATERIALS SCIENCE
• SCHOTTKY BARRIER
• CROSS SECTION
• THERMAL STABILITY
• SCANNING ELECTRON MICROSCOPY
• X RAY DIFFRACTION
• RAPID THERMAL PROCESSING
• TRANSMISSION ELECTRON MICROSCOPY
• GALLIUM ARSENIDE