Measurement of Epitaxial Film Thickness Using an Infrared Ellipsometer

• 1 January 1966
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 113  (5) , 472
• https://doi.org/10.1149/1.2423998

Abstract

Keywords

• INFRARED ELLIPSOMETER
• EPITAXIAL FILM THICKNESS
• FILM THICKNESS USING