ZnO on Si integrated acoustic sensor
- 1 January 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 357-362
- https://doi.org/10.1016/0250-6874(83)85044-6
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Silicon as a mechanical materialProceedings of the IEEE, 1982