An increased implant current by combining a long-slit microwave ion source with a converging lens
- 1 April 1991
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 55 (1-4) , 300-304
- https://doi.org/10.1016/0168-583x(91)96181-j
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Emittances of a microwave ion source for implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- The precision implant 9000 beam lineNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987